litho.md

(inverse) lithography bookmarks

• (inverse) lithography bookmarks

  • Computational lithography

  • a tutorial on inverse lithography

  • Inverse Lithography Technology (ILT), What is the Impact to Photomask Industry?

  • Optical Lithography Simulation using Wavelet Transform

  • semiwiki link

  • full chip ILT masks

  • Mask Design for Optical Microlithography — An Inverse Imaging Problem

  • Inverse Synthesis of Phase-Shifting Mask for Optical Lithography

    • Inverse synthesis problems in optical lithography
    • Stanley H. Chan

  • Proximal Gradient Based Inverse Lithography

  • Method and system for computing fourier series coefficients ...

  • Mask Design for Optical Microlithography — An Inverse Imaging Problem

  • Machine Learning for ILT

  • lith bib

  • True Process Variation Aware OPC with Variational Lithography Modeling

  • A Novel Intensity Based Optical Proximity Correction Algorithm

  • Optical Lithography Simulationusing Wavelet Transform

  • matlab codes from computational_lithography book

  • PhD thesis: Fast and Accurate Lithography Simulation and Optical Proximity Correction for Nanometer Design for Manufacturing

    • ELIAS paper
    • ELIAS download

  • Cascadic multigrid algorithm for robust inverse mask synthesis in optical lithography

  • Fast aerial image simulations for partially coherent systems by transmission cross coefficient decomposition with analytical kernels

  • Coprocessor Acceleration for DSL

• Signals: FFT, convolution, etc.

  • The conv function and implementation tradeoffs
    • matlab-fftconv
      • Matthew James Johnson
    • basic convolution explanation
    • Tutorial on 2D convolution of images
    • CS1114 Section 6: Convolution
  • Sparse Fast Fourier Transform
    • What is the sparse Fourier transform?
    • sfft-sparse-fast-fourier-transform
    • Recent Developments in the Sparse Fourier Transform

• SOCS (Sum of coherent systems)

  • Sum of Coherent Systems Decomposition by SVD
  • US Patent: Sum of CoherentSystems (SOCS) Approximation Based on Object Information

• Nick Cobb's PhD Thesis

  • Fast Optical and Process Proximity Correction Algorithms for Integrated Circuit Manufacturing

• The Waveguide Electromagnetic Field Solver and its Extension and Application to Lithography Simulation

• SMO (Source Mask Optimization)

  • Efficient source and mask optimization with augmented Lagrangian methods in optical lithography

• DDM Domain Decomposition Methods

  • Domain Decomposition Methods for the Electromagnetic Simulation of Scattering from 3D Structures